Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6379576 | Systems and methods for variable mode plasma enhanced processing of semiconductor wafers | Leroy Luo, Stephen E. Savas, Craig Ranft, Wolfgang Helle, Robert Guerra | 2002-04-30 |
| 6335293 | Systems and methods for two-sided etch of a semiconductor substrate | Laizhong Luo, Ying Holden, Robert Guerra, Allan B. Wiesnoski, Nicole Kuhl +2 more | 2002-01-01 |