Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6342691 | Apparatus and method for thermal processing of semiconductor substrates | Kristian E. Johnsgard, James A. Givens, Stephen E. Savas, Brad S. Mattson, Ashur J. ATANOS | 2002-01-29 |