Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436796 | Systems and methods for epitaxial processing of a semiconductor substrate | Robert D. Mailho, Mark J. O'Hara, Glenn A. Pfefferkorn, Gary Evans | 2002-08-20 |
| 6403925 | System and method for thermal processing of a semiconductor substrate | Brad S. Mattson, James McDiarmid, Vladimir J. Zeitlin | 2002-06-11 |
| 6399921 | System and method for thermal processing of a semiconductor substrate | Brad S. Mattson, James McDiarmid, Vladimir J. Zeitlin | 2002-06-04 |
| 6342691 | Apparatus and method for thermal processing of semiconductor substrates | Jean-François Daviet, James A. Givens, Stephen E. Savas, Brad S. Mattson, Ashur J. ATANOS | 2002-01-29 |