Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436796 | Systems and methods for epitaxial processing of a semiconductor substrate | Robert D. Mailho, Mark J. O'Hara, Glenn A. Pfefferkorn, Kristian E. Johnsgard | 2002-08-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436796 | Systems and methods for epitaxial processing of a semiconductor substrate | Robert D. Mailho, Mark J. O'Hara, Glenn A. Pfefferkorn, Kristian E. Johnsgard | 2002-08-20 |