Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403925 | System and method for thermal processing of a semiconductor substrate | Kristian E. Johnsgard, Brad S. Mattson, James McDiarmid | 2002-06-11 |
| 6399921 | System and method for thermal processing of a semiconductor substrate | Kristian E. Johnsgard, Brad S. Mattson, James McDiarmid | 2002-06-04 |