Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403925 | System and method for thermal processing of a semiconductor substrate | Kristian E. Johnsgard, James McDiarmid, Vladimir J. Zeitlin | 2002-06-11 |
| 6399921 | System and method for thermal processing of a semiconductor substrate | Kristian E. Johnsgard, James McDiarmid, Vladimir J. Zeitlin | 2002-06-04 |
| 6355909 | Method and apparatus for thermal processing of semiconductor substrates | Stewart Griffiths, Robert H. Nilson, Stephen E. Savas | 2002-03-12 |
| 6342691 | Apparatus and method for thermal processing of semiconductor substrates | Kristian E. Johnsgard, Jean-François Daviet, James A. Givens, Stephen E. Savas, Ashur J. ATANOS | 2002-01-29 |