Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6355147 | Porous electrode apparatus for electrodeposition of detailed metal structures or microelectronic interconnections | Stewart Griffiths, Jill M. Hruby | 2002-03-12 |
| 6355909 | Method and apparatus for thermal processing of semiconductor substrates | Stewart Griffiths, Brad S. Mattson, Stephen E. Savas | 2002-03-12 |