Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432831 | Gas distribution apparatus for semiconductor processing | Rajinder Dhindsa, Fangli Hao | 2002-08-13 |
| 6433484 | Wafer area pressure control | Fangli Hao, Bruno Morel | 2002-08-13 |
| 6389677 | Perimeter wafer lifting | — | 2002-05-21 |
| 6391787 | Stepped upper electrode for plasma processing uniformity | Rajinder Dhindsa, Mukund Srinivasan, Aaron Eppler | 2002-05-21 |
| 6363882 | Lower electrode design for higher uniformity | Fangli Hao, Albert R. Ellingboe | 2002-04-02 |