Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6481723 | Lift pin impact management | Dean J. Larson | 2002-11-19 |
| 6432831 | Gas distribution apparatus for semiconductor processing | Rajinder Dhindsa, Eric H. Lenz | 2002-08-13 |
| 6433484 | Wafer area pressure control | Eric H. Lenz, Bruno Morel | 2002-08-13 |
| 6415736 | Gas distribution apparatus for semiconductor processing | Rajinder Dhindsa | 2002-07-09 |
| 6363882 | Lower electrode design for higher uniformity | Albert R. Ellingboe, Eric H. Lenz | 2002-04-02 |
| 6350317 | Linear drive system for use in a plasma processing system | Keith Dawson | 2002-02-26 |