Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490536 | Integrated load simulator | Albert R. Ellingboe | 2002-12-03 |
| 6433484 | Wafer area pressure control | Fangli Hao, Eric H. Lenz | 2002-08-13 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490536 | Integrated load simulator | Albert R. Ellingboe | 2002-12-03 |
| 6433484 | Wafer area pressure control | Fangli Hao, Eric H. Lenz | 2002-08-13 |