Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492774 | Wafer area pressure control for plasma confinement | Taejoon Han, David W. Benzing | 2002-12-10 |
| 6490536 | Integrated load simulator | Bruno Morel | 2002-12-03 |
| 6436739 | Thick adherent dielectric films on plastic substrates and method for depositing same | Paul Wickboldt, Steven D. Theiss, Patrick Smith | 2002-08-20 |
| 6363882 | Lower electrode design for higher uniformity | Fangli Hao, Eric H. Lenz | 2002-04-02 |