Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492774 | Wafer area pressure control for plasma confinement | Taejoon Han, Albert R. Ellingboe | 2002-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492774 | Wafer area pressure control for plasma confinement | Taejoon Han, Albert R. Ellingboe | 2002-12-10 |