Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432831 | Gas distribution apparatus for semiconductor processing | Fangli Hao, Eric H. Lenz | 2002-08-13 |
| 6415736 | Gas distribution apparatus for semiconductor processing | Fangli Hao | 2002-07-09 |
| 6391787 | Stepped upper electrode for plasma processing uniformity | Mukund Srinivasan, Aaron Eppler, Eric H. Lenz | 2002-05-21 |
| 6337277 | Clean chemistry low-k organic polymer etch | Wen-Ben Chou, Ching-Hwa Chen | 2002-01-08 |