Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391787 | Stepped upper electrode for plasma processing uniformity | Rajinder Dhindsa, Aaron Eppler, Eric H. Lenz | 2002-05-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391787 | Stepped upper electrode for plasma processing uniformity | Rajinder Dhindsa, Aaron Eppler, Eric H. Lenz | 2002-05-21 |