Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399512 | Method of making metallization and contact structures in an integrated circuit comprising an etch stop layer | Alain Blosse, Sanjay Thedki, Yitzhak Gilboa | 2002-06-04 |
| 6375744 | Sequential in-situ heating and deposition of halogen-doped silicon oxide | Laxman Murugesh, Maciek Orczyk, Pravin Narawankar, Turgut Sahin | 2002-04-23 |
| 6372634 | Plasma etch chemistry and method of improving etch control | Sanjay Thekdi, Manuj Rathor, James E. Nulty | 2002-04-16 |
| 6373679 | ELECTROSTATIC OR MECHANICAL CHUCK ASSEMBLY CONFERRING IMPROVED TEMPERATURE UNIFORMITY ONTO WORKPIECES HELD THEREBY, WORKPIECE PROCESSING TECHNOLOGY AND/OR APPARATUS CONTAINING THE SAME, AND METHOD(S) FOR HOLDING AND/OR PROCESSING A WORKPIECE WITH THE SAME | James E. Nulty, Paul Arleo, Siamak Salimian | 2002-04-16 |
| 6350665 | Semiconductor structure and method of making contacts and source and/or drain junctions in a semiconductor device | Bo Jin | 2002-02-26 |