Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436799 | Process for annealing semiconductors and/or integrated circuits | Krishnaswamy Ramkumar | 2002-08-20 |
| 6372634 | Plasma etch chemistry and method of improving etch control | Jianmin Qiao, Sanjay Thekdi, James E. Nulty | 2002-04-16 |