Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406640 | Plasma etching method | Chan-Lon Yang, Usha Raghuram, Kimberley A. Kaufman, Daniel Arnzen | 2002-06-18 |
| 6372634 | Plasma etch chemistry and method of improving etch control | Jianmin Qiao, Sanjay Thekdi, Manuj Rathor | 2002-04-16 |
| 6373679 | ELECTROSTATIC OR MECHANICAL CHUCK ASSEMBLY CONFERRING IMPROVED TEMPERATURE UNIFORMITY ONTO WORKPIECES HELD THEREBY, WORKPIECE PROCESSING TECHNOLOGY AND/OR APPARATUS CONTAINING THE SAME, AND METHOD(S) FOR HOLDING AND/OR PROCESSING A WORKPIECE WITH THE SAME | Jianmin Qiao, Paul Arleo, Siamak Salimian | 2002-04-16 |