Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372634 | Plasma etch chemistry and method of improving etch control | Jianmin Qiao, Manuj Rathor, James E. Nulty | 2002-04-16 |
ST
Sanjay Thekdi
Overall (2002): #121,769 of 266,432Top 50%
1
Patents 2002