Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406640 | Plasma etching method | Chan-Lon Yang, Usha Raghuram, Kimberley A. Kaufman, James E. Nulty | 2002-06-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406640 | Plasma etching method | Chan-Lon Yang, Usha Raghuram, Kimberley A. Kaufman, James E. Nulty | 2002-06-18 |