Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6450117 | Directing a flow of gas in a substrate processing chamber | Padmanaban Krishnaraj, Michael S. Cox, Canfeng Lai, Narendra Dubey, Tom K. Cho +2 more | 2002-09-17 |
| 6375744 | Sequential in-situ heating and deposition of halogen-doped silicon oxide | Maciek Orczyk, Pravin Narawankar, Jianmin Qiao, Turgut Sahin | 2002-04-23 |