Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468405 | Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone | Shanghsien Rou, Alexander Boris Khazanov, Paul Stephen McLeod, Mark A. Shows, Kuo Hsing Hwang +1 more | 2002-10-22 |
| 6355581 | Gas-phase additives for an enhancement of lateral etch component during high density plasma film deposition to improve film gap-fill capability | Vladislav Vassiliev, John Sudijono, Yelehanka Ramachandramurthy Pradeep | 2002-03-12 |