Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497799 | Method and apparatus for sputter deposition of multilayer films | — | 2002-12-24 |
| 6482301 | Target shields for improved magnetic properties of a recording medium | Qixu Chen, Charles Leu, Mark A. Shows, Rajiv Yadav Ranjan | 2002-11-19 |
| 6468405 | Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone | Shanghsien Rou, Alexander Boris Khazanov, Jie Yu, Mark A. Shows, Kuo Hsing Hwang +1 more | 2002-10-22 |
| 6444100 | Hollow cathode sputter source | — | 2002-09-03 |