Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468405 | Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone | Alexander Boris Khazanov, Jie Yu, Paul Stephen McLeod, Mark A. Shows, Kuo Hsing Hwang +1 more | 2002-10-22 |