Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500771 | Method of high-density plasma boron-containing silicate glass film deposition | John Sudijono, Alan Cuthbertson | 2002-12-31 |
| 6355581 | Gas-phase additives for an enhancement of lateral etch component during high density plasma film deposition to improve film gap-fill capability | John Sudijono, Yelehanka Ramachandramurthy Pradeep, Jie Yu | 2002-03-12 |