Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485618 | Integrated copper fill process | Praburam Gopalraja, Jianming Fu, Fusen Chen, Girish Dixit, Zheng Xu +2 more | 2002-11-26 |
| 6451177 | Vault shaped target and magnetron operable in two sputtering modes | Praburam Gopalraja, Jianming Fu, Fusen Chen, Girish Dixit, Zheng Xu +1 more | 2002-09-17 |
| 6436251 | Vault-shaped target and magnetron having both distributed and localized magnets | Praburam Gopalraja, Jianming Fu | 2002-08-20 |
| 6413382 | Pulsed sputtering with a small rotating magnetron | Praburam Gopalraja, Jianming Fu, Zheng Xu | 2002-07-02 |
| 6358376 | Biased shield in a magnetron sputter reactor | Jianming Fu, Praburam Gopalraja | 2002-03-19 |
| 6352629 | Coaxial electromagnet in a magnetron sputtering reactor | — | 2002-03-05 |