Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495392 | Process for producing a semiconductor device | Akira Sakai, Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Tadashi Sawayama +1 more | 2002-12-17 |
| 6470823 | Apparatus and method for forming a deposited film by a means of plasma CVD | Takahiro Yajima, Masahiro Kanai, Takeshi Shishido | 2002-10-29 |
| 6472296 | Fabrication of photovoltaic cell by plasma process | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Sawayama +1 more | 2002-10-29 |
| 6447612 | Film-forming apparatus for forming a deposited film on a substrate, and vacuum-processing apparatus and method for vacuum-processing an object | Koichiro Moriyama, Masahiro Kanai, Tadashi Hori | 2002-09-10 |
| 6436797 | Apparatus and method for forming a deposited film on a substrate | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Sawayama +1 more | 2002-08-20 |