Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495392 | Process for producing a semiconductor device | Akira Sakai, Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Yuzo Koda +1 more | 2002-12-17 |
| 6472296 | Fabrication of photovoltaic cell by plasma process | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Yuzo Koda +1 more | 2002-10-29 |
| 6436797 | Apparatus and method for forming a deposited film on a substrate | Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Yuzo Koda +1 more | 2002-08-20 |
| 6368944 | Method of manufacturing photovoltaic element and apparatus therefor | Shotaro Okabe, Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Yuzo Kohda +2 more | 2002-04-09 |