Issued Patents 2002
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495392 | Process for producing a semiconductor device | Akira Sakai, Yasushi Fujioka, Shotaro Okabe, Tadashi Sawayama, Yuzo Koda +1 more | 2002-12-17 |
| 6482668 | Process for producing photovoltaic device | Naoto Okada, Hirokazu Ohtoshi, Tadashi Hori | 2002-11-19 |
| 6472296 | Fabrication of photovoltaic cell by plasma process | Yasushi Fujioka, Shotaro Okabe, Akira Sakai, Tadashi Sawayama, Yuzo Koda +1 more | 2002-10-29 |
| 6470823 | Apparatus and method for forming a deposited film by a means of plasma CVD | Takahiro Yajima, Yuzo Koda, Takeshi Shishido | 2002-10-29 |
| 6447612 | Film-forming apparatus for forming a deposited film on a substrate, and vacuum-processing apparatus and method for vacuum-processing an object | Koichiro Moriyama, Yuzo Koda, Tadashi Hori | 2002-09-10 |
| 6436797 | Apparatus and method for forming a deposited film on a substrate | Yasushi Fujioka, Shotaro Okabe, Akira Sakai, Tadashi Sawayama, Yuzo Koda +1 more | 2002-08-20 |
| 6413794 | Method of forming photovoltaic element | Hitomi Sano, Hideo Tamura | 2002-07-02 |
| 6397775 | Deposited film forming system and process | Hitomi Sano, Atsushi Koike, Hiroshi Sugai | 2002-06-04 |
| 6368944 | Method of manufacturing photovoltaic element and apparatus therefor | Shotaro Okabe, Yasushi Fujioka, Akira Sakai, Tadashi Sawayama, Yuzo Kohda +2 more | 2002-04-09 |
| 6367920 | Ink cartridge for ink-jet recording apparatus, and ink-jet recording apparatus | Yuichi Seki, Masanori Takemura, Akihiko Kitazawa | 2002-04-09 |
| 6367502 | Flow control device | Etsumi Nagaya | 2002-04-09 |
| 6350489 | Deposited-film forming process and deposited-film forming apparatus | Koichiro Moriyama, Hiroshi Echizen, Hirokazu Ohtoshi, Takehito Yoshino, Atsushi Yasuno +2 more | 2002-02-26 |
| 6338872 | Film forming method | Takehito Yoshino, Hiroshi Echizen, Hirokazu Otoshi, Atsushi Yasuno, Kohei Yoshida +2 more | 2002-01-15 |