Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447612 | Film-forming apparatus for forming a deposited film on a substrate, and vacuum-processing apparatus and method for vacuum-processing an object | Masahiro Kanai, Yuzo Koda, Tadashi Hori | 2002-09-10 |
| 6350489 | Deposited-film forming process and deposited-film forming apparatus | Hiroshi Echizen, Masahiro Kanai, Hirokazu Ohtoshi, Takehito Yoshino, Atsushi Yasuno +2 more | 2002-02-26 |
| 6338872 | Film forming method | Takehito Yoshino, Hiroshi Echizen, Masahiro Kanai, Hirokazu Otoshi, Atsushi Yasuno +2 more | 2002-01-15 |