Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482668 | Process for producing photovoltaic device | Naoto Okada, Masahiro Kanai, Hirokazu Ohtoshi | 2002-11-19 |
| 6447612 | Film-forming apparatus for forming a deposited film on a substrate, and vacuum-processing apparatus and method for vacuum-processing an object | Koichiro Moriyama, Masahiro Kanai, Yuzo Koda | 2002-09-10 |
| 6399411 | Method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device | Shotaro Okabe, Akira Sakai, Yuzo Kohda, Takahiro Yajima | 2002-06-04 |
| 6368944 | Method of manufacturing photovoltaic element and apparatus therefor | Shotaro Okabe, Yasushi Fujioka, Masahiro Kanai, Akira Sakai, Tadashi Sawayama +2 more | 2002-04-09 |