Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6470823 | Apparatus and method for forming a deposited film by a means of plasma CVD | Takahiro Yajima, Masahiro Kanai, Yuzo Koda | 2002-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6470823 | Apparatus and method for forming a deposited film by a means of plasma CVD | Takahiro Yajima, Masahiro Kanai, Yuzo Koda | 2002-10-29 |