Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497796 | Apparatus and method for controlling plasma uniformity across a substrate | Kaihan Ashtiani, Karl B. Levy, Andrew L. Nordquist, Larry D. Hartsough | 2002-12-24 |
| 6444105 | Physical vapor deposition reactor including magnet to control flow of ions | Andrew L. Nordquist, Kaihan Ashtiani, Larry D. Hartsough, Karl B. Levy | 2002-09-03 |
| 6342133 | PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter | Gerard C. D'Couto, George Tkach, Jeff Dewayne Lyons, Max Biberger, Jean Lu +1 more | 2002-01-29 |