Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471831 | Apparatus and method for improving film uniformity in a physical vapor deposition system | Tom Yu, Linda Stenzel, Jeffrey Tobin | 2002-10-29 |
| 6468404 | Apparatus and method for reducing redeposition in a physical vapor deposition system | Tom Yu, Jeffrey Tobin | 2002-10-22 |
| 6342133 | PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter | Gerard C. D'Couto, George Tkach, Jeff Dewayne Lyons, Max Biberger, Kwok Fai Lai +1 more | 2002-01-29 |