Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471831 | Apparatus and method for improving film uniformity in a physical vapor deposition system | Jean Lu, Tom Yu, Jeffrey Tobin | 2002-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471831 | Apparatus and method for improving film uniformity in a physical vapor deposition system | Jean Lu, Tom Yu, Jeffrey Tobin | 2002-10-29 |