Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471831 | Apparatus and method for improving film uniformity in a physical vapor deposition system | Jean Lu, Linda Stenzel, Jeffrey Tobin | 2002-10-29 |
| 6468404 | Apparatus and method for reducing redeposition in a physical vapor deposition system | Jean Lu, Jeffrey Tobin | 2002-10-22 |
| 6362794 | Antenna of wireless LAN card | — | 2002-03-26 |