Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6342133 | PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter | Gerard C. D'Couto, George Tkach, Jeff Dewayne Lyons, Kwok Fai Lai, Jean Lu +1 more | 2002-01-29 |