Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497796 | Apparatus and method for controlling plasma uniformity across a substrate | Kaihan Ashtiani, Karl B. Levy, Kwok Fai Lai, Larry D. Hartsough | 2002-12-24 |
| 6444105 | Physical vapor deposition reactor including magnet to control flow of ions | Kwok Fai Lai, Kaihan Ashtiani, Larry D. Hartsough, Karl B. Levy | 2002-09-03 |