Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488807 | Magnetic confinement in a plasma reactor having an RF bias electrode | Kenneth S. Collins, Chan-Lon Yang, Jerry Wong, Jeffrey Marks, Peter Keswick +7 more | 2002-12-03 |
| 6454508 | Dual cassette load lock | Phil Salzman, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +1 more | 2002-09-24 |
| 6454519 | Dual cassette load lock | Phil Salzman, Steven Murdoch, Cheng Wang, Mark A. Stenholm, James Howard +2 more | 2002-09-24 |
| 6352937 | Method for stripping organic based film | Shingo Kadomura, Jerry Wong | 2002-03-05 |