Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391437 | COMPOSITE MATERIAL AND MANUFACTURING METHOD THEREOF, SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF, SUBSTRATE MOUNTING STAGE AND MANUFACTURING METHOD THEREOF, AND SUBSTRATE PROCESSING METHOD | Kei Takatsu, Shinsuke Hirano | 2002-05-21 |
| 6380065 | Interconnection structure and fabrication process therefor | Naoki Komai, Mitsuru Taguchi, Akira Yoshio, Takaaki Miyamoto | 2002-04-30 |
| 6352937 | Method for stripping organic based film | Jerry Wong, Masato Toshima | 2002-03-05 |