Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465342 | Semiconductor device and its manufacturing method | Naoki Komai | 2002-10-15 |
| 6380065 | Interconnection structure and fabrication process therefor | Naoki Komai, Shingo Kadomura, Akira Yoshio, Takaaki Miyamoto | 2002-04-30 |
| 6361662 | Method for fabricating a semiconductor device in a magnetron sputtering system | Yasuhiro Chiba, Keiichi Maeda | 2002-03-26 |