Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6361662 | Method for fabricating a semiconductor device in a magnetron sputtering system | Yasuhiro Chiba, Mitsuru Taguchi | 2002-03-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6361662 | Method for fabricating a semiconductor device in a magnetron sputtering system | Yasuhiro Chiba, Mitsuru Taguchi | 2002-03-26 |