Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6379575 | Treatment of etching chambers using activated cleaning gas | Gerald Yin, Xue-Yu Qian, Patrick Leahey, Jonathan D. Mohn, Waiching Chow +2 more | 2002-04-30 |
| 6367410 | Closed-loop dome thermal control apparatus for a semiconductor wafer processing system | Patrick Leahey, Jerry Chen, Richard E. Remington, Simon Yavelberg, Timothy D. Driscoll +3 more | 2002-04-09 |