Issued Patents 2002
Showing 51–52 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6339955 | Thickness measurement using AFM for next generation lithography | Khoi A. Phan, Bharath Rangarajan | 2002-01-22 |
| 6335152 | Use of RTA furnace for photoresist baking | Ramkumar Subramanian, Bharath Rangarajan, Michael K. Templeton | 2002-01-01 |