Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702847 | Phase shift photomask, phase shift photomask blank, and process for fabricating them | Norihiro Tarumoto, Yukio Iimura, Koichi Mikami | 1997-12-30 |
| 5688617 | Phase shift layer-containing photomask, and its production and correction | Koichi Mikami, Yoichi Takahashi, Hiroshi Fujita, Masa-aki Kurihara | 1997-11-18 |
| 5614335 | Blanks for halftone phase shift photomasks, halftone phase shift photomasks, and methods for fabricating them | Keiji Hashimoto, Junji Fujikawa, Hiroshi Mohri, Masahiro Takahashi, Yukio Iimura | 1997-03-25 |
| 5614336 | Phase shift layer-containing photomask, and its production and correction | Koichi Mikami, Yoichi Takahashi, Hiroshi Fujita, Masa-aki Kurihara | 1997-03-25 |
| 5604060 | Halftone phase shift photomask comprising a single layer of halftone light blocking and phase shifting | Sachiko Ishikita, Koichi Mikami | 1997-02-18 |