Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688617 | Phase shift layer-containing photomask, and its production and correction | Koichi Mikami, Hiroyuki Miyashita, Hiroshi Fujita, Masa-aki Kurihara | 1997-11-18 |
| 5614336 | Phase shift layer-containing photomask, and its production and correction | Koichi Mikami, Hiroyuki Miyashita, Hiroshi Fujita, Masa-aki Kurihara | 1997-03-25 |