Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702847 | Phase shift photomask, phase shift photomask blank, and process for fabricating them | Norihiro Tarumoto, Hiroyuki Miyashita, Yukio Iimura | 1997-12-30 |
| 5688617 | Phase shift layer-containing photomask, and its production and correction | Hiroyuki Miyashita, Yoichi Takahashi, Hiroshi Fujita, Masa-aki Kurihara | 1997-11-18 |
| 5614336 | Phase shift layer-containing photomask, and its production and correction | Hiroyuki Miyashita, Yoichi Takahashi, Hiroshi Fujita, Masa-aki Kurihara | 1997-03-25 |
| 5604060 | Halftone phase shift photomask comprising a single layer of halftone light blocking and phase shifting | Hiroyuki Miyashita, Sachiko Ishikita | 1997-02-18 |