Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702847 | Phase shift photomask, phase shift photomask blank, and process for fabricating them | Hiroyuki Miyashita, Yukio Iimura, Koichi Mikami | 1997-12-30 |
NT
Norihiro Tarumoto
Overall (1997): #97,565 of 185,788Top 55%
1
Patents 1997