Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5604060 | Halftone phase shift photomask comprising a single layer of halftone light blocking and phase shifting | Hiroyuki Miyashita, Koichi Mikami | 1997-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5604060 | Halftone phase shift photomask comprising a single layer of halftone light blocking and phase shifting | Hiroyuki Miyashita, Koichi Mikami | 1997-02-18 |