Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5684574 | In-process film thickness monitoring system | Akira Shiokawa, Hideaki Yasui, Koichi Kotera, Yuuji Mukai, Hiroyoshi Tanaka | 1997-11-04 |
| 5674366 | Method and apparatus for fabrication of dielectric thin film | Shigenori Hayashi, Kazuki Komaki, Takeshi Kamada, Masatoshi Kitagawa, Takashi Deguchi +1 more | 1997-10-07 |
| 5672252 | Method and apparatus for fabrication of dielectric film | Shigenori Hayashi, Kazuki Komaki, Takeshi Kamada, Masatoshi Kitagawa, Takashi Deguchi +1 more | 1997-09-30 |
| 5662965 | Method of depositing crystalline carbon-based thin films | Masahiro Deguchi, Masatoshi Kitagawa | 1997-09-02 |
| 5612536 | Thin film sensor element and method of manufacturing the same | Hideo Torii, Takeshi Kamada, Shigenori Hayashi, Ryoichi Takayama, Masumi Hattori | 1997-03-18 |