Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5674366 | Method and apparatus for fabrication of dielectric thin film | Shigenori Hayashi, Kazuki Komaki, Takeshi Kamada, Masatoshi Kitagawa, Takashi Deguchi +1 more | 1997-10-07 |
| 5672252 | Method and apparatus for fabrication of dielectric film | Shigenori Hayashi, Kazuki Komaki, Takeshi Kamada, Masatoshi Kitagawa, Takashi Deguchi +1 more | 1997-09-30 |
| 5663089 | Method for producing a laminated thin film capacitor | Atsushi Tomozawa, Eiji Fujii, Hideo Torii, Masumi Hattori, Satoru Fujii | 1997-09-02 |
| 5612536 | Thin film sensor element and method of manufacturing the same | Hideo Torii, Takeshi Kamada, Shigenori Hayashi, Takashi Hirao, Masumi Hattori | 1997-03-18 |